Very Large Format Back Illuminated CCDs

The University of Arizona Imaging Technology Laboratory has processed several types of very large format (>4K × 4K pixel) charge coupled devices for low light level scientific applications. These back illuminated devices were produced from frontside die fabricated by or for Fairchild Imaging Systems, Semiconductor Technology Associates, the Jet Propulsion Laboratory, and Kodak. A Philips 7K × 9K frontside device has also been processed using similar techniques. The backside sensors yield >90% quantum efficiency (QE). All devices show excellent charge transfer efficiency (CTE > 0.999997) at operating temperatures (typically –100 °C). Devices specifically designed for low signal applications have been demonstrated with less than 4 electrons read noise. This revised version was published online in July 2006 with corrections to the Cover Date.