A Study on the CdZnTe Array Detector

The CdZnTe array detector is a new type of semiconductor detector being rapidly developed in recent years. It possesses a high spatial resolution and a high energy resolution, and it can work at room temperatures. This paper describes the physical properties and working principle of the CdZnTe array detector, as well as the manufacturing technology, including the chip pretreatment, passivation, ohmic electrode preparation, array template selection, and array packaging technology (micro-interconnection). For evaluating the perfor-mance of the detector, the authors have developed successfully a 4 pixel×4 pixel CdZnTe array and an 8 pixel×8 pixel CdZnTe array (with the thicknesses of 5 mm and 2 mm, the pixel size of 2 mm×2 mm, and the gaps of 0.15 mm and 0.2 mm, respectively) in cooperation with the partner. A multi-channel electronic readout system based on the ASIC (Application Specific Integrated Circuit) chip is devel-oped independently for the charge measurement of the 4 pixel×4 pixel CdZnTe array. The energy spectra and corresponding energy resolutions of the 16 pixels are obtained with the ¹³⁷Cs radiative source, among them the best resolution is 4.8%@662 kev.