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Multi-parameter identification of gratings measurement by Experimental Ray Tracing |
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| Authors: | Li-Si Chen Zhong-Wen Hu Hai-Jiao Jiang Hui-Min Kang Chen-Zhong Wang |
| Abstract: | A simple method for measuring grating groove density as well as its position and orientation is proposed based on the idea of ERT(Experimental Ray Tracing).Conv... |
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