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Migration of Fe atoms in crystalline (Si) and amorphous (SiO2) materials at their irradiation and heating
Authors:S. N. Shilobreeva  V. I. Zinenko  Yu. A. Agafonov  V. V. Saraykin  V. S. Bronsky
Affiliation:1. Vernadsky Institute of Geochemistry and Analytical Chemistry, Russian Academy of Sciences, ul. Kosygina 19, Moscow, 119991, Russia
2. Institute of Microelectronics Technology and Ultrahigh-Purity Materials, Russian Academy of Sciences, ul. Akad. Osip’yana 6, Chernogolovka, Moscow oblast, 142432, Russia
3. Lukin Scientific Research Institute of Physical Problems, proezd 4806 15, Zelenograd, Moscow, 124460, Russia
Abstract:
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