Antenna-coupled arrays of NbSi micro-bolometers |
| |
Authors: | Aur��lien Bideaud Benoit Belier Alain Benoit Laurent Berg�� Philippe Camus Sophie Collin Louis Dumoulin Christian Hoffmann Stefanos Marnieros Alessandro Monfardini |
| |
Affiliation: | 1. Institut N??el, CNRS & Universit?? Joseph Fourier, BP 166, 38042, Grenoble Cedex 9, France 3. IEF, Orsay, France 2. CSNSM, CNRS, Orsay, France
|
| |
Abstract: | Microbolometers are at present the most sensitive detectors for mm and sub-mm Astronomy. They are in use in most of the present instruments in that bandwidth. We have developed filled arrays of NbSi-based planar antenna coupled microbolometers. The fabrication details are given, together with characterization of the NbSi thermometers and optical results. The optical performances are potentially good for ground-based mm-wave astronomy applications, while the overall detectors performances are limited by low-frequency excess noise in the thermometric NbSi high-impedance sensors (Anderson insulator). |
| |
Keywords: | |
本文献已被 SpringerLink 等数据库收录! |
|