高科技厂房结构微振响应分析

高科技精密仪器厂房,对环境微振动非常敏感,要求控制结构的振动位移和速度。本文利用Kanai-Tajim i功率谱密度函数,模拟由交通工具引起的地面扰动,对某洁净室框架结构进行模态分析和微振谱分析。通过计算结构的振动特性和基频以及响应功率谱,得出振幅范围,从而获得结构在环境微振下的响应。为了研究结构微振的影响因素,分析了各种梁柱截面尺寸的振动响应,通过与微振动通用标准BBN-VC比较,评价了结构微振性能,为结构抗微振设计提供参考依据。     

Experimental study of a hybrid platform for high‐tech equipment protection against earthquake and microvibration

This paper presents an experimental study to explore the possibility of using a hybrid platform to ensure the functionality of high‐tech equipment against microvibration and to protect high‐tech equipment from damage when an earthquake occurs. A three‐storey building model and a hybrid platform model were designed and manufactured. The two‐layer hybrid platform, on which the high‐tech equipment is placed, was installed on the first floor of the building to work as a passive platform aiming at abating acceleration response of the equipment during an earthquake and functioning as an actively controlled platform that intends to reduce velocity response of the equipment under a normal working condition. For the hybrid platform working as a passive platform, it was designed in such a way that its stiffness and damping ratio could be changed, whereas for the hybrid platform functioning as an active platform, a piezoelectric actuator with a sub‐optimal velocity feedback control algorithm was used. A series of shaking table tests, traffic‐induced vibration tests and impact tests were performed on the building with and without the platform to examine the performance of the hybrid platform. The experimental results demonstrate that the hybrid platform is feasible and effective for high‐tech equipment protection against earthquake and microvibration. Copyright © 2007 John Wiley & Sons, Ltd.     

Hybrid platform for high‐tech equipment protection against earthquake and microvibration

To ensure the high quality of ultra‐precision products such as semiconductors and optical microscopes, high‐tech equipment used to make these products requires a normal working environment with extremely limited vibration. Some of high‐tech industry centres are also located in seismic zones: the safety of high‐tech equipment during an earthquake event becomes a critical issue. It is thus imperative to find an effective way to ensure the functionality of high‐tech equipment against microvibration and to protect high‐tech equipment from damage when earthquake events occur. This paper explores the possibility of using a hybrid platform to mitigate two types of vibration. The hybrid platform, on which high‐tech equipment is installed, is designed to work as a passive isolation platform to abate mainly acceleration response of high‐tech equipment during an earthquake and to function as an actively controlled platform to reduce mainly velocity response of high‐tech equipment under normal working condition. To examine the performance of the hybrid platform, the analytical model of a coupled hybrid platform and building system incorporating with magnetostrictive actuators is established. The simulation results obtained by applying the analytical model to a high‐tech facility indicate that the proposed hybrid platform is feasible and effective. Copyright © 2006 John Wiley & Sons, Ltd.     

Hybrid platform for vibration control of high‐tech equipment in buildings subject to ground motion. Part 2: analysis

The experimental results of using a hybrid platform to mitigate vibration of a batch of high‐tech equipment installed in a building subject to nearby traffic‐induced ground motion have been presented and discussed in the companion paper. Based on the identified dynamic properties of both the building and the platform, this paper first establishes an analytical model for hybrid control of the building‐platform system subject to ground motion in terms of the absolute co‐ordinate to facilitate the absolute velocity feedback control strategy used in the experiment. The traffic‐induced ground motion used in the experiment is then employed as input to the analytical model to compute the dynamic response of the building‐platform system. The computed results are compared with the measured results, and the comparison is found to be satisfactory. Based on the verified analytical model, coupling effects between the building and platform are then investigated. A parametric study is finally conducted to further assess the performance of both passive and hybrid platforms at microvibration level. The analytical study shows that the dynamic interaction between the building and platform should be taken into consideration. The hybrid control is effective in reducing both velocity response and drift of the platform/high‐tech equipment at microvibration level with reasonable control force. Copyright © 2003 John Wiley & Sons, Ltd.     

Three‐dimensional vibration control of high‐tech facilities against earthquakes and microvibration using hybrid platform

High‐tech equipments engaged in the production of ultra‐precision products have very stringent vibration criteria for their functionality in normal operation conditions and their safety during an earthquake. Most previous investigations were based on simplified planar models of building structures, despite the fact that real ground motions and structures are always three‐dimensional. This paper hence presents a three‐dimensional analytical study of a hybrid platform on which high‐tech equipments are mounted for their vibration mitigation. The design methodology of the hybrid platform proposed in this study is based on dual‐level performance objectives for high‐tech equipments: safety against seismic hazard and functionality against traffic‐induced microvibration. The passive devices (represented by springs and viscous dampers) and the active actuators are designed, respectively, to meet vibration criteria corresponding to safety level and functionality level. A prototype three‐story building with high‐tech equipments installed on the second floor is selected in the case study to evaluate the effectiveness of the hybrid platform. The optimal location of the platform on the second building floor is determined during the design procedure in terms of the minimal H ₂ cost function of absolute velocity response. The simulation of the coupled actuator‐platform‐building system subjected to three‐dimensional ground motions indicates that the optimally designed hybrid platform can well achieve the dual target performance and effectively mitigate vibration at both ground motion levels. Copyright © 2009 John Wiley & Sons, Ltd.     

Road vehicle-induced vibration control of microelectronics facilities

A hybrid control platform is investigated in this paper to mitigate microvibrations to a group of vibration-sensitive equipment installed in a microelectronics facility subject to nearby road vehicle-induced horizontal and vertical ground motions. The hybrid control platform, on which microelectronics equipment is installed, is mounted on a building floor through a series of passive mounts and controlled by hydraulic actuators in both horizontal and vertical directions. The control platform is an elastic body with significant bending modes of vibration, and a sub-optimal control algorithm is used to manipulate the hydraulic actuators with actuator dynamics included. The finite element model and the equations of motion of the coupled platform-building system are then established in the absolute coordinate to facilitate the feedback control and performance evaluation of the platform. The horizontal and vertical ground vibrations at the base of the building induced by nearby moving road vehicles are assumed to be stationary random processes. A typical three-story microelectronics building is selected as a case study. The case study shows that the vertical vibration of the microelectronics building is higher than the horizontal. The use of a hybrid control platform can effectively reduce both horizontal and vertical microvibrations of the microelectronics equipment to the level which satisfies the stringent microscale velocity requirement specified in the Bolt Beranek & Newman (BBN) criteria.