Fabrication of suspended graphene devices and their electronic properties |
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Authors: | Li Qiang Cheng Zeng-Guang Li Zhong-Jun Wang Zhi-Hua and Fang Ying |
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Abstract: | Suspended graphene devices are successfully fabricated by using a novel PMMA/MMA/PMMA tri-layer resist technique. The gap between graphene and dielectric substrate can be easily controlled by the thickness of the bottom PMMA layer, and no wet-etching with hazardous hydrofluoric acid is involved in our fabrication process. Electrical characterizations on suspended graphene devices are performed in vacuum when in-situ current annealing directly leads to a significant improvement on transport properties of graphene, i.e., the increase of carrier mobility with the reduction of width of Dirac peak. Our results make a new opportunity to study intrinsic properties of graphene. |
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Keywords: | graphene transport suspension high mobility |
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