| 离子束抛光工艺中驻留时间的分步消去算法 |
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| 引用本文： | 郭伟远,成贤锴,白华.离子束抛光工艺中驻留时间的分步消去算法[J].天文研究与技术,2011(4). |
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| 作者姓名： | 郭伟远 成贤锴 白华 |
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| 作者单位： | 中国科学院国家天文台南京天文光学技术研究所;中国科学院天文光学技术重点实验室;中国科学院研究生院; |
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| 基金项目： | 国家自然科学基金(10373018)资助 |
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| 摘 要： | 在离子束抛光工艺中,驻留时间的求解是很关键的。求解驻留时间是利用离子束加工函数和驻留时间的卷积等于镜面去除量的关系,而离子束抛光的过程就是一个执行解卷积的过程。受此启发,采用一种分步消去算法解矩阵的卷积运算。这种新算法占用计算机资源少,运算速度快,同时可以根据预先设定的加工精度算得满足要求的驻留时间函数。对这种新算法进行仿真分析,采用3种不同的消去顺序分步加工,得到了理想的仿真结果,PV值由抛光前的363.721 nm分别减小到6.136 nm、33.347 nm、3.875 nm,抛光后的镜面精度提高了很多。
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| 关 键 词： | 离子束抛光 驻留时间 矩阵运算 计算机控制光学表面成形 |
Algorithm of Dwell Time of Stepwise Elimination for Ion-Beam Polishing |
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| Guo Weiyuan,Cheng Xiankai,Bai Hua.Algorithm of Dwell Time of Stepwise Elimination for Ion-Beam Polishing[J].Astronomical Research & Technology,2011(4). |
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| Authors: | Guo Weiyuan Cheng Xiankai Bai Hua |
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| Institution: | Guo Weiyuan1,2,Cheng Xiankai1,3,Bai Hua1,2(1.National Astronomical Observatories/Nanjing Institute of Astronomical Optics & Technology,Chinese Academy of Sciences,Nanjing 210042,China,2.Key Laboratory of Astronomical Optics & Technology,Nanjing Institute of Astronomical Optics & Technology,3.Graduate University of Chinese Academy of Sciences,Beijing 100049,China) |
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| Abstract: | In the process of ion-beam polishing solution of dwell time is very crucial.Such a solution is derived from the relation that the amount of material to be polished equals the processing function convolved with dwell time.The process of ion-beam polishing is just to deconvolve the relation.This inspires us to propose a new algorithm of stepwise elimination.The new algorithm requires less computer resources,runs faster,and yields adequate dwell-time function according to preset accuracy.We carried out simulat... |
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| Keywords: | Ion-beam polishing Dwell time Matrix operation Computer controlled optical surfacing |
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