Linear dichroism in ALD layers of TiO2 |
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| Authors: | C Das M Tallarida D Schmeißer |
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| Institution: | 1. Angewandte Physik-Sensorik, Brandenburgische Technische Universit?t Cottbus, Konrad-Wachsmann-Allee 17, 03046, Cottbus, Germany
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| Abstract: | We prepare TiO2 film by ALD and study their electronic properties by soft X-ray absorption spectroscopy (XAS) and photoelectron spectroscopy. We focus on XAS and X-ray linear dichroism to indentify band onset and learn about local distortion of the Ti–O octahedral atomic and about defects which cause Ti-based electronic states within the band gap. |
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