| 微平面接触分离中弯月面力的计算 |
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| 引用本文： | 刘思思,张朝辉,刘俊铭.微平面接触分离中弯月面力的计算[J].海洋学报,2010,32(10):6902-6907. |
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| 作者姓名： | 刘思思 张朝辉 刘俊铭 |
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| 作者单位： | 北京交通大学机械与电子控制工程学院,北京 100044;北京交通大学机械与电子控制工程学院,北京 100044;北京交通大学机械与电子控制工程学院,北京 100044 |
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| 基金项目： | 国家自然科学基金(批准号:50705006)和北京市自然科学基金(批准号:3082015)资助的课题. |
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| 摘 要： | 微平面间黏着力对微机电系统(MEMS)非常重要,常是决定其能量损耗乃至寿命长短的最主要因素.MEMS中的黏着力主要来源之一就是介于两互相接触平面间的弯月面力.弯月面力主要取决于相互接触的两平面间形成的弯月面形状.本文通过分析两微小平面在分离过程中弯月面形状的变化,得到在不同表面亲水/疏水性能、初始液面高度、分离距离等条件下的弯月面形状,计算得出在不同初始条件下断裂高度和弯月面力的数值以及随之变化的规律,为MEMS的性能分析和寿命计算提供依据.
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| 关 键 词： | 微机电系统 黏着力 表面能 弯月面力 |
| 修稿时间： | 1/7/2010 12:00:00 AM |
Calculation of meniscus force during separation of microsurfaces |
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| Liu Si-Si,Zhang Chao-Hui and Liu Jun-Ming.Calculation of meniscus force during separation of microsurfaces[J].Acta Oceanologica Sinica (in Chinese),2010,32(10):6902-6907. |
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| Authors: | Liu Si-Si Zhang Chao-Hui and Liu Jun-Ming |
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| Institution: | School of Mechanical, Electronic and Control Engineering, Beijing Jiaotong University, Beijing 100044, China;School of Mechanical, Electronic and Control Engineering, Beijing Jiaotong University, Beijing 100044, China;School of Mechanical, Electronic and Control Engineering, Beijing Jiaotong University, Beijing 100044, China |
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| Abstract: | The adhesive force between microsurfaces is very important to microelectric mechanical system (MEMS), being always a key factor that detemines the energy dissipation and even the life span. In MEMS, the meniscus force mainly depends on the meniscus shape formed between the contact surfaces. This paper analyzes the meniscus shape changes during the seperation of two microsurfaces. Different meniscus shapes were obtained as a result of different hydrophilic/hydrophobic properties, initial liquid heights and separate distances and so on. The fracture height, the meniscus force value and their change rules in different initial conditions are obtained by numerical simulation, which provides a basis of the MEMS performance analysis and life span calculation. |
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| Keywords: | micro-electric mechanical system adhesive force surface energy meniscus force |
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